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Process Data Settings Window

Mask Undercut⚓︎

Defines the mask undercut of the functional layer

  • If the mask undercut value is positive, all outer edges of the functional layer shrink according to the specified value. Negative values enlarge the structure which is supported by the tool but there is no physical reason.
  • Default = 0 (Units of length, e.g. µm)

Etching Cardinal Directions⚓︎

Defines the sidewall etch offset of the functional layer

  • The sidewall etching parameters define the offset of the bottom edge compared to the edge at the top face of the functional layer. Positive values make the functional layer at the bottom edge smaller and negative values wider.
  • Different values can be assigned to faces pointing “north”, “south”, “east” and “west”. Interpolations are applied for faces pointing in other directions except values for “north-east”, “south-east”, “south-west” and “north-west” have been set.
  • Specific etch offsets can also be assigned to individual springs (see SPRI command).
  • Default = 0 (Units of length, e.g. µm)

Etching Intercardinal Directions⚓︎

Defines the sidewall etch offset of the functional layer

  • Sidewall etching parameters “north”, “south”, “east” and “west” are interpolated in all other directions. Additional sidewall etching parameters can be set for “north-east”, “north-west”, “south-east” and “south-west” which allow for complicated etching profiles.
  • Default = deactivated

Fillet Radius Spring-Spring-Junction⚓︎

Defines the radius of corner fillets at spring-spring-junctions

  • The rounding radius is applied to all spring-spring-junctions except specific values have been set to spring elements by the SPRI command.
  • The rounding radius is defined for the nominal layout. The corner fillets can be deactivated in the Simulation Settings window.
  • Mask undercut and sidewall etch offsets change the radius and create elliptical lines for asymmetric process data settings.
  • ≥ 0, default = 0 (Units of length, e.g. µm)

Fillet Radius Spring-Mass-Junction⚓︎

Defines the radius of corner fillets at spring-mass-junctions

  • The rounding radius is applied to all spring-mass-junctions (including anchors) except specific values have been set to spring elements by the SPRI command.
  • The rounding radius is defined for the nominal layout in the user model input file. The corner fillets can be deactivated in the Simulation Seetings window.
  • Mask undercut and sidewall etch offsets change the radius and create elliptical lines for asymmetric process data settings.
  • ≥ 0, default = 0 (Units of length, e.g. µm)

Activate Corner Fillet⚓︎

Activates or deactivates the corner fillets at spring-mass- and spring-jump-junctions for subsequent “Build Solids” operations

  • Default = on

Activate Mask Etching⚓︎

Activates or deactivates the “Mask Undercut” for subsequent “Build Solids” operations

  • Default = on

Activate Side Etching⚓︎

Activates or deactivates the “Sidewall etching” values for subsequent “Build Solids” operations

  • Default = on

Anchor Extension Depth⚓︎