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Introduction to MEMS Design Automation - MDA

Electrostatic MEMS design requires computationally efficient simulation strategies. Practical devices, such as angular rate sensors, typically implement multi-axis sensing (rx, ry, rz), leading to increased model complexity.

Design layouts consist of multiple interconnected bodies with non-trivial geometries, including dense perforation patterns for release and damping control. Resolving these features with sufficient accuracy while maintaining short simulation times is critical.

Efficient design workflows rely on fast and robust transient and harmonic simulations, combined with tightly coupled multi-domain modeling (mechanical, fluidic, and electrostatic).

A key requirement is a consistent, interconnected workflow that integrates seamlessly into existing design processes and enables scalable MEMS design automation, where a single model definition serves as the basis for all derived simulations.

MEMS design automation with the i-ROM Modelbuilder enables this workflow by providing a model-based, parametric design environment.

Geometries are defined using reusable library elements, allowing efficient construction of complex layouts with consistent parameterization.

A one-click model generation approach automatically derives simulation-ready models, including process-specific effects from process design kits (PDKs), such as mask undercut, corner rounding, and sidewall angle profiles.

MEMS Design Automation Workflow with the i-ROM Modelbuilder⚓︎

The workflow starts with the i-ROM Sketcher for mask layout creation. Alternatively, command-based definitions can be used. GDSII import is supported for integration of existing designs.

Based on the layout, i-ROM Modelbuilder generates a 3D geometry including process-specific effects from process design kits (PDKs), such as mask undercut, corner roundings and sidewall angle profiles. Additional effects, such as package warp, can also be considered.

Two simulation approaches are available:

  • Quasi-analytic (QA) modeling with reduced-order models (ROM), based on analytical equations and rigid-body assumptions, enabling very fast simulations for the initial design stage.
  • Finite element modeling (FEM) with automatic mesh generation and ROM reduction, using modal superposition (MSUP), improves simulation performance significantly compared to classical FEM, enabling efficient simulation of complex systems such as 6-axis inertial measurement units (IMUs) on standard PC hardware.

Once the model is established, multiple export interfaces are available, including FEM tools (e.g. Ansys®, COMSOL®), system-level environments (MATLAB®/Simulink, VHDL, Verilog-AMS), 3D CAD (IGES), and mask layout (GDSII).

After manufacturing and qualification, e.g. using Polytec® MSA or LyncéeTec® DHM, the design can be iteratively refined based on measurement data.

The flyer of the i-ROM Modelbuilder can be found here: Flyer.pdf