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Quick Start

  • Find the project folder
    • Right click on the Desktop icon and select "Open file location" to find the project folder.
    • Copy the "ProjectFiles" folder into your working directory.

Hint

If the desktop icon is missing, the standard installation folder can be found in %appdata%/i-ROM. Simply copy this path into the File Explorer address bar to open the installation folder automatically. Create a shortcut to 'modelbuilder.exe'.

  • Open the project
    • Click on "Open Project" and choose "Accelerometer_area.iromproj" inside the "Accelerometer_UsersManual" folder to open it.
    • A window will open asking if you want to build the 3D model. Press "Yes".

  • A 3D model is being rendered. To adjust the view, use the mouse buttons:

    • Press "Alt + left mouse button" to move the structure in x- or y-directions.
    • Press "Alt + right mouse button" to tilt the structure around x- and y-axes.
    • Scroll the mouse wheel to zoom in or out.
  • In this Guide, the following windows will be explained.

Sketcher⚓︎

  • The Sketcher is used to sketch the mask layout.
  • Here, the model's mask can be drawn and shapes can be assigned.

  • Compile and build the model

    • Click on the "Compile Model" button. This corresponds to the "Build Solids" button.

Build ROM⚓︎

  • Click on "Build ROM" and configure the following settings.
    • Reduced order model level: Select "Finite Element Model"
    • Number of eigenvalues: This should be set to 10.
    • System components to compute: Select all of the options.

  • Press "OK" to start the building process.

    • Please be patient, this might take about 2 minutes.
  • Three tabs above the "Model Tree" will appear.

fig21_Mesh Mesh: A mesh will be generated automatically.
fig22_Basis Basis: In the "General Plot Controls" panel, set "Show Mesh Boundary" to False to not show the mesh.
Select "usum" for "Color Contour" to visualize forces.
fig23_CombCell Comb Cell 1: This shows a comb cell. Rotate the model to gain a better view.
In the "Datapoint Selection" panel, the movement's direction can be changed by double-clicking on an option.
The colors symbolize the pressure, whereby red means high and blue means low pressure.
  • Inspect the Damping Properties
    • Navigate to the Basis tab.
    • Change "Color Contour" to "pressure".
    • Select Mode Nr. 2 in "Model Selection" by double-clicking on it.
    • Rotate the model to view the underside.
    • Clicking on "Damping Properties" reveals more detailed information about the slide and queeze qualities.

  • Press "Cancel" to close the window again.

Assign Loads⚓︎

  • Import Loads and Contraints from a file
    • Click on "Assign Loads" to open the Loads and Constraints window.
    • Navigate to the "summary" tab and click on "Import from File". Now, select "loads_area_stat.irommod".

  • This uses commands to adjust the settings. It is possible to do the same manually.
  • The following steps correspond to the command COND,sense-,mass,v_sens-;
    • Navigate to the "electrical" tab.
    • Select Load Type: Choose "Link capacitances to voltage ports (COND)".
    • Capacity Label [capa_name]: Enter or select "sense-".
    • Conductor port [cond_port1]: Enter or select "mass".
    • Conductor port [cond_port2]: Enter or select "v_sens-".
    • Press "Add (+)" to confirm.

Simulate⚓︎

  • Click on "Simulate" and then "Static Analysis".
  • The Analysis Settings should be imported correctly. If not, enter or select the values as shown in the figure below.
  • Press "Start Simulation".

  • Inspect DC Sweep
    • In the "Solution Item Selection", navigate to "uy" of "RB 1".
    • Go to the "3D View" and click on "Start Animation".
    • In the "DC Sweep" panel, you can inspect a corresponding graph.

  • To demonstrate the export interfaces, switch to a different model by clicking on "Open Project" and then "Accelerometer_gap.iromproj".
  • When asked to build the model, press "Yes".

  • Import Loads and Constraints

    • Press "Assign Loads", then "summary" and then "Import from File".
    • Choose "loads_gap_trans.irommod"
    • Afterwards close the Loads and Contraints window.

  • Click on "Simulink Export". A window will appear, click on "Export".

  • A message will show if the export was completed successfully. After pressing "OK", the file explorer will be opened automatically and show the exported files.
  • Open "Accelerometer_gap_build_simulink.m" with MATLAB by double-clicking on it.
    • Wait shortly until the application has finished initializing. Once it is done, "Ready" will be displayed in the bottom left corner.
    • Select "Accelerometer_gap_build_simulink.m" in the "Files" panel. The code will be displayed in the middle.
    • Click on "Run" to save and run the active file.

  • Once the file is ready, press the spacebar to center the view.
    • Look for "RB_1", right click on it and press "Uncomment".
    • Then, double-click on "RB_1" to open a graph.
    • Press the "Run" button to draw the graph.

  • Go back into the i-ROM Modelbuilder and start a simulation of the current file.
    • Through the imported loads and constraints, "Transient Analysis" should already be selected.
    • Make sure that the values shown in the figure below are entered.

  • In the "Solution Item Selection" navigate to "uy" of "RB 1".
  • Inside the "Time Response" panel, a graph will appear. Compare it to the graph generated in MATLAB.

GDS Export⚓︎

  • Click on the "GDS Export" button and then on "Export" in the appearing window.
  • A message will show if the export was completed successfully. After pressing "OK", the file explorer will be opened automatically and show the exported files.
  • Open "Accelerometer_gap.gds" in KLayout by double-clicking on it.